2,2,4,4,6,6-Hexamethylcyclotrisilazane

• CAT Number: M068850
• CAS Number: 1009-93-4
• Molecular Formula: C6H21N3Si3
• Molecular Weight: 219.51
• Purity: ≥95%
• Storage: -20°C
• IUPAC Name: 2,2,4,4,6,6-hexamethyl-1,3,5,2,4,6-triazatrisilinane
• InChI: InChI=1S/C6H21N3Si3/c1-10(2)7-11(3,4)9-12(5,6)8-10/h7-9H,1-6H3
• InChIKey: WGGNJZRNHUJNEM-UHFFFAOYSA-N
• SMILES: C[Si]1(N[Si](N[Si](N1)(C)C)(C)C)C

2,2,4,4,6,6-Hexamethylcyclotrisilazane (Cat No.:M068850), commonly known as HMCTS, is a cyclic organosilicon compound with the molecular formula C6H24N3Si3. It is widely used as a silazane precursor in the semiconductor industry for its ability to form silicon nitride (Si3N4) films through chemical vapor deposition (CVD) processes. HMCTS is a colorless liquid with a pungent odor and is highly reactive due to the presence of silicon-nitrogen bonds. Its use as a precursor in silicon nitride film deposition makes it valuable in the manufacturing of integrated circuits, thin-film transistors, and other electronic devices.