DI(T-BUTYLAMINO)SILANE

• CAT Number: M034852
• CAS Number: 186598-40-3
• Molecular Formula: C8H20N2Si
• Molecular Weight: 172.347
• Purity: ≥95%
• Storage: -20°C
• IUPAC Name: bis(tert-butylamino)silicon
• InChI: InChI=1S/C8H20N2Si/c1-7(2,3)9-11-10-8(4,5)6/h9-10H,1-6H3
• InChIKey: PHUNDLUSWHZQPF-UHFFFAOYSA-N
• SMILES: CC(C)(C)N[Si]NC(C)(C)C

Di(t-butylamino)silane (Cat.No:M034852) is a chemical compound utilized in various industrial processes, primarily in the semiconductor industry. It serves as a precursor for the deposition of silicon-containing thin films, particularly silicon nitride and silicon oxide, using chemical vapor deposition (CVD) techniques. This compound contributes to advanced materials and electronics manufacturing.